Abstract
Here we present the first atomic resolution TEM imaging at 40 keV using an aberration-corrected, monochromated source TEM. Low-voltage High-Resolution Electron Microscopy (LVHREM) has several advantages, including increased cross-sections for inelastic and elastic scattering, increased contrast per electron and improved spectroscopy efficiency, decreased delocalization effects and reduced knock-on damage. Together, these often improve the contrast to damage ratio obtained on a large class of samples. Third-order aberration correction now allows us to operate the TEM at low energies while retaining atomic resolution, which was previously impossible. At low voltage the major limitation to resolution becomes the chromatic aberration limit. We show that using a source monochromator we are able to reduce the effect of chromatic aberration and achieve a usable high-resolution limit at 40 keV to less than 1Å. We show various materials' examples of the application of the technique to image graphene and silicon, and compare atomic resolution images with electron multislice simulations.
References
Nov 29, 2005·Ultramicroscopy·L Y ChangJ M Titchmarsh
Oct 1, 2003·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·John C H Spence
Jun 29, 2010·Journal of Electron Microscopy·Takeo SasakiKazu Suenaga
Feb 5, 2011·Science·Jonathan N ColemanValeria Nicolosi
Aug 2, 2011·Ultramicroscopy·U KaiserG Benner
Citations
Feb 26, 2016·Biophysical Journal·Endre MajorovitsRasmus R Schröder
Feb 24, 2012·Ultramicroscopy·P C TiemeijerC Kisielowski
Apr 1, 2015·Chemical Reviews·Dang Sheng SuRobert Schlögl
Jul 19, 2012·Microscopy Research and Technique·R F Egerton
Nov 20, 2014·Small·Alicja BachmatiukMark Hermann Rummeli
May 31, 2015·Ultramicroscopy·P W Hawkes
Jun 12, 2013·Ultramicroscopy·S J HaighA I Kirkland
Jul 9, 2013·Ultramicroscopy·Hannes LichteDaniel Wolf
Apr 29, 2014·Ultramicroscopy·David C BellNatasha Erdman
Apr 1, 2014·Ultramicroscopy·R F Egerton
May 21, 2014·Ultramicroscopy·Takeo SasakiKazu Suenaga
Mar 29, 2018·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Cheng SunDagmar Gerthsen
Dec 12, 2012·Physical Review Letters·S M SchrammR M Tromp
Aug 8, 2017·Small·Chen LuoJunhao Chu
Nov 12, 2019·IUCrJ·K NaydenovaC J Russo
Apr 20, 2019·Journal of Microscopy·M HugenschmidtD Gerthsen
Feb 19, 2021·Physical Chemistry Chemical Physics : PCCP·Rafael G MendesMark H Rümmeli
Nov 30, 2021·Analytical Chemistry·Aldona MzykRomana Schirhagl