A fiber optic sensor with a metal organic framework as a sensing material for trace levels of water in industrial gases

Analytica Chimica Acta
Shin-Ichi OhiraKei Toda

Abstract

Industrial gases such as nitrogen, oxygen, argon, and helium are easily contaminated with water during production, transfer and use, because there is a high volume fraction of water in the atmosphere (approximately 1.2% estimated with the average annual atmospheric temperature and relative humidity). Even trace water (<1 parts per million by volume (ppmv) of H2O, dew point < -76 °C) in the industrial gases can cause quality problems in the process such as production of semiconductors. Therefore, it is important to monitor and to control trace water levels in industrial gases at each supplying step, and especially during their use. In the present study, a fiber optic gas sensor was investigated for monitoring trace water levels in industrial gases. The sensor consists of a film containing a metal organic framework (MOF). MOFs are made of metals coordinated to organic ligands, and have mesoscale pores that adsorb gas molecules. When the MOF, copper benzene-1,3,5-tricarboxylate (Cu-BTC), was used as a sensing material, we investigated the color of Cu-BTC with water adsorption changed both in depth and tone. Cu-BTC crystals appeared deep blue in dry gases, and then changed to light blue in wet gases. An optical gas sensor with the ...Continue Reading

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Citations

Nov 18, 2015·Analytical Chemistry·Xu-dong Wang, Otto S Wolfbeis
Jul 14, 2016·Chemical Society Reviews·Chenghong WangKang Li
May 4, 2017·Chemical Society Reviews·William P LustigSujit K Ghosh
Apr 13, 2018·Analytical Sciences : the International Journal of the Japan Society for Analytical Chemistry·Shin-Ichi OhiraKei Toda
Aug 28, 2020·Angewandte Chemie·Lin-Tao ZhangSu-Ting Han
Jun 22, 2021·Journal of Colloid and Interface Science·Ke WuTong Zhang
May 15, 2021·Angewandte Chemie·Ralph FreundStefan Wuttke
Jul 31, 2019·Chemical Reviews·Pei-Long WangHong-Cai Zhou
Dec 12, 2018·Inorganic Chemistry·Nian ZhaoGuangshan Zhu
Jun 26, 2018·ACS Applied Materials & Interfaces·Andrew M UllmanMark D Allendorf
Nov 2, 2019·Analytical Chemistry·Xu-Dong Wang, Otto S Wolfbeis
Jul 19, 2018·ACS Applied Materials & Interfaces·Jindan ZhangShengchang Xiang

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