A FinFET with one atomic layer channel.

Nature Communications
Mao-Lin ChenZheng Han

Abstract

Since its invention in the 1960s, one of the most significant evolutions of metal-oxide-semiconductor field effect transistors (MOS-FETs) would be the three dimensionalized version that makes the semiconducting channel vertically wrapped by conformal gate electrodes, also recognized as FinFET. During the past decades, the width of fin (W[Formula: see text]) in FinFETs has shrunk from about 150 nm to a few nanometers. However, W[Formula: see text] seems to have been levelling off in recent years, owing to the limitation of lithography precision. Here, we show that by adapting a template-growth method, different types of mono-layered two-dimensional crystals are isolated in a vertical manner. Based on this, FinFETs with one atomic layer fin are obtained, with on/off ratios reaching [Formula: see text]. Our findings push the FinFET to the sub 1 nm fin-width limit, and may shed light on the next generation nanoelectronics for higher integration and lower power consumption.

References

Dec 15, 1992·Physical Review. B, Condensed Matter·T Takagahara, K Takeda
Sep 13, 2000·Nature·T Ito, S Okazaki
Jan 15, 2011·Physical Review Letters·Kin Fai MakTony F Heinz
Feb 1, 2011·Nature Nanotechnology·B RadisavljevicA Kis
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Jan 21, 2017·Science·Chenguang QiuLian-Mao Peng

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Citations

Jan 16, 2021·Advanced Materials·Xiankun ZhangYue Zhang
Jun 10, 2021·Advanced Materials·Lei YinJun He
Jul 11, 2021·Advanced Materials·Nannan LiYi Luo
Aug 3, 2021·Nano Research·Yao GuoYang Chai
Sep 17, 2021·ACS Applied Materials & Interfaces·Lenan ZhangEvelyn N Wang

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Methods Mentioned

BETA
chips
chemical vapor deposition
AFM

Software Mentioned

COMSOL Multiphysics
COMSOL
ML

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