A high-accuracy and convenient figure measurement system for large convex lens

Optics Express
Zhihui TianHuaijiang Yang

Abstract

We present a novel optical configuration of a phase-shifting interferometer for high-accuracy figure metrology of large dioptric convex spherical surfaces. The conformation and design considerations according to measurement accuracy, practicability, and system errors analysis are described. More in detail, we show the design principle and methods for the crucial parts. Some are expounded upon with examples for thorough understanding. The measurement procedures and the alignment approaches are also described. Finally, a verification experiment is further presented to verify our theoretical design. This system gives full-aperture and high-precision surface testing while maintaining relatively low cost and convenient operation.

Citations

Nov 13, 2015·Optics Express·Shanyong ChenShengyi Li
Mar 17, 2019·Optics Express·L R GravesD W Kim

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