A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy

The Review of Scientific Instruments
Afshin AlipourS O Reza Moheimani

Abstract

Limited Z-axis bandwidth of piezotube scanners employed in conventional Scanning Tunneling Microscopes (STMs) has been a major limiting factor in achieving high scan speeds in STM applications. Slow Z-axis dynamics of typical piezotube scanners combined with the weight of the STM tip/tip holder assembly, that the scanner has to carry, substantially limit the achievable Z-axis bandwidth in both imaging and lithography modes. To tackle this issue, we propose a high bandwidth microelectromechanical-system-based nanopositioner to be integrated into an existing STM scanner. The device is designed to replace the STM tip and fine Z-positioning mechanisms in the conventional STM setup, while providing an order of magnitude higher bandwidth in Z axis. The device is microfabricated using double silicon-on-isolator technology, and standard cleanroom processes. Experiments show that tunneling current between the device tip and a highly ordered pyrolytic graphite sample can be successfully established and maintained in air using the proposed device in a feedback loop. Results indicate that the proposed device uniquely combines a very high resolution and a large stroke with a substantially larger Z-axis bandwidth compared to that of conventi...Continue Reading

References

Jun 15, 1988·Physical Review. B, Condensed Matter·N D Lang
Oct 11, 2001·Proceedings of the National Academy of Sciences of the United States of America·T AndoA Toda
Jul 3, 2004·Ultramicroscopy·Johannes H KindtPaul K Hansma
Dec 25, 2007·Pflügers Archiv : European journal of physiology·Toshio AndoHayato Yamashita
May 6, 2010·The Review of Scientific Instruments·E C M DisseldorpW M van Spengen
Nov 5, 2014·The Review of Scientific Instruments·Sachin P WadikhayeS O Reza Moheimani
Mar 3, 2015·The Review of Scientific Instruments·Mohammad MaroufiS O Reza Moheimani

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