A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer

Sensors
Manjunath R VenkateshGuo Qi Zhang

Abstract

Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such as a microhotplate with IDE capacitor, further allows study of the temperature- dependent sensing response of VOCs. In this paper, the design, fabrication, and characterization of a low-power MEMS microhotplate with IDE capacitor to study the temperature-dependent sensing response to methanol using Zeolitic imidazolate framework (ZIF-8), a class of metal-organic framework (MOF), is presented. A Titanium nitride (TiN) microhotplate with aluminum IDEs suspended on a silicon nitride membrane is fabricated and characterized. The power consumption of the ZIF-8 MOF-coated device at an operating temperature of 50 ∘ C is 4.5 mW and at 200 ∘ C it is 26 mW. A calibration methodology for the effects of temperature of the isolation layer between the microhotplate electrodes and the capacitor IDEs is developed. The device coated with ZIF-8 MOF shows a response to methanol in the concentration range of 500 ppm to 7000 ppm. The detection limit of t...Continue Reading

References

Nov 11, 2011·Chemical Reviews·Lauren E KrenoJoseph T Hupp
Oct 13, 2015·Journal of the American Chemical Society·Michael G CampbellMircea Dincă
Apr 26, 2017·ACS Applied Materials & Interfaces·Sumit SachdevaLouis C P M de Smet
May 13, 2017·Sensors·Michael G Campbell, Mircea Dincă
Mar 13, 2018·Beilstein Journal of Nanotechnology·Maryam BarzegarAzam Iraji Zad
Jun 22, 2018·Chemical Communications : Chem Comm·Michael KoKatherine A Mirica

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Citations

May 15, 2021·Angewandte Chemie·Ralph FreundStefan Wuttke
Jan 12, 2022·ACS Sensors·Linoy DeryDaniel Mandler

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Methods Mentioned

BETA
quartz microbalance
Scanning Electron Microscopy
X-Ray
SMA

Software Mentioned

COMSOL Multiphysics

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