A MEMS-based Benzene Gas Sensor with a Self-heating WO(3) Sensing Layer.

Sensors
Ming-Tsun KeLung-Ming Fu

Abstract

In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO(3) sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation occurs on the heated WO(3) sensing layer. This causes a change in the electrical conductivity of the WO(3) film, and hence changes the resistance between the IDEs. The benzene concentration is then computed from the change in the measured resistance. A specific orientation of the WO(3) layer is obtained by optimizing the sputtering process parameters. It is found that the sensitivity of the gas sensor is optimized at a working temperature of 300 °C. At the optimal working temperature, the experimental results show that the sensor has a high degree of sensitivity (1.0 KΩ ppm(-1)), a low detection limit (0.2 ppm) and a rapid response time (35 s).

References

Jan 5, 2002·Geophysical Research Letters·S FriedfeldF Tittel
Jan 25, 2005·Indoor Air·J Enrique Cometto-MuñizMichael H Abraham
Oct 17, 2007·Sensors·Yu-Hsiang WangChe-Ming Chiang

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Citations

Sep 10, 2013·Physical Chemistry Chemical Physics : PCCP·Liwei WangWeiping Huang
Sep 27, 2012·Sensors·Xiao LiuHuansheng Ning
Aug 19, 2010·Angewandte Chemie·Antonio TricoliAlexandra Teleki
Jun 9, 2016·Small·Ting WangXiaoming Sun
Feb 7, 2020·Nanoscale Research Letters·Weiguang TongYunfa Chen
Jul 17, 2020·Sensors·Md Ashfaque Hossain Khan, Mulpuri V Rao

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