A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

Sensors and Actuators. A, Physical
Xiaoyang ZhangHuikai Xie

Abstract

Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonantscanning. The micro-platform has a large piston scan range of up to 800 µm at only 6V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 µm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

References

Oct 7, 2004·Current Opinion in Neurobiology·Amit D MehtaMark J Schnitzer
Aug 12, 2005·Optics Letters·Tuqiang XieZhongping Chen
Nov 22, 2005·Nature Methods·Benjamin A FlusbergMark J Schnitzer
Mar 3, 2011·Journal of Biomedical Optics·Benno H W HendriksNenad Mihajlovic
Oct 19, 2011·Proceedings of the National Academy of Sciences of the United States of America·David R RiveraChris Xu

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Citations

Aug 28, 2018·Journal of Micromechanics and Microengineering : Structures, Devices, and Systems·Jongsoo ChoiKenn Oldham
Feb 26, 2016·Optics Express·Yeong-Hyeon SeoKi-Hun Jeong
Jan 27, 2019·Micromachines·Zhen Qiu, Wibool Piyawattanametha
Nov 15, 2018·Micromachines·Yangkyu ParkJong-Hyun Lee
Jul 2, 2017·Micromachines·Zhen Qiu, Wibool Piyawattanamatha
Jul 1, 2017·Biomedical Optics Express·Michalina J GoraXingde Li

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