A Novel Method of Fabricating Convoluted Shaped Electrode Arrays for Neural and Retinal Prostheses.

Sensors and Actuators. A, Physical
R BhandariF Solzbacher

Abstract

A novel fabrication technique has been developed for creating high density (6.25 electrodes/mm(2)), out of plane, high aspect ratio silicon-based convoluted microelectrode arrays for neural and retinal prostheses. The convoluted shape of the surface defined by the tips of the electrodes could compliment the curved surfaces of peripheral nerves and the cortex, and in the case of retina, its spherical geometry. The geometry of these electrode arrays has the potential to facilitate implantation in the nerve fascicles and to physically stabilize it against displacement after insertion. This report presents a unique combination of variable depth dicing and wet isotropic etching for the fabrication of a variety of convoluted neural array geometries. Also, a method of deinsulating the electrode tips using photoresist as a mask and the limitations of this technique on uniformity are discussed.

References

Jan 1, 1992·Annals of Biomedical Engineering·R B BeardR Schmukler
Jan 1, 1992·Annals of Biomedical Engineering·K E JonesR A Normann
Jun 1, 1992·IEEE Transactions on Bio-medical Engineering·D J EdellL D Clark
Aug 1, 1991·IEEE Transactions on Bio-medical Engineering·P K CampbellR A Normann
Jan 16, 2004·IEEE Transactions on Bio-medical Engineering·Almut BrannerRichard A Normann

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Citations

May 8, 2014·IEEE Reviews in Biomedical Engineering·Ramin PashaieJustin Williams
Mar 26, 2011·Orvosi hetilap·Akos KusnyerikJános Németh
Aug 14, 2010·Sensors and Actuators. A, Physical·R BhandariF Solzbacher
May 19, 2010·Biomedical Microdevices·Rajmohan BhandariFlorian Solzbacher
Dec 3, 2014·Journal of Neural Engineering·Mehdi JorfiJeffrey R Capadona

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