A Novel Method to Fabricate Silicon Nanowire p-n Junctions by a Combination of Ion Implantation and in-situ Doping.

Nanoscale Research Letters
Pratyushdas KanungoWolfgang Skorupa

Abstract

We demonstrate a novel method to fabricate an axial p-n junction inside <111> oriented short vertical silicon nanowires grown by molecular beam epitaxy by combining ion implantation with in-situ doping. The lower halves of the nanowires were doped in-situ with boron (concentration ~1018cm-3), while the upper halves were doubly implanted with phosphorus to yield a uniform concentration of 2 × 1019 cm-3. Electrical measurements of individually contacted nanowires showed excellent diode characteristics and ideality factors close to 2. We think that this value of ideality factors arises out of a high rate of carrier recombination through surface states in the native oxide covering the nanowires.

References

Sep 14, 2006·Nano Letters·Emanuel TutucSupratik Guha
Jun 25, 2008·Journal of Nanoscience and Nanotechnology·Yaswanth RangineniKurt Langworthy
Jun 26, 2008·Nano Letters·Alan ColliAndrea C Ferrari
Aug 15, 2008·Nano Letters·Go ImamuraShinji Hayashi
Sep 4, 2008·Nano Letters·Thomas J KempaCharles M Lieber
Mar 5, 2009·Nano Letters·S HoffmannS H Christiansen
May 8, 2009·Nanotechnology·Pratyush Das KanungoUlrich Gösele

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Citations

Apr 19, 2013·Nanoscale Research Letters·Wen Qing LiChang Zhong Jiang
Aug 3, 2010·Nanoscale Research Letters·Buyong WanXiaoshan He
May 16, 2017·Langmuir : the ACS Journal of Surfaces and Colloids·Ori Hazut, Roie Yerushalmi
Jul 31, 2019·Chemical Reviews·Chuancheng JiaXiangfeng Duan
Sep 27, 2017··U. HashimTijjani Adam

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