A single-atom transistor.

Nature Nanotechnology
Martin FuechsleMichelle Y Simmons

Abstract

The ability to control matter at the atomic scale and build devices with atomic precision is central to nanotechnology. The scanning tunnelling microscope can manipulate individual atoms and molecules on surfaces, but the manipulation of silicon to make atomic-scale logic circuits has been hampered by the covalent nature of its bonds. Resist-based strategies have allowed the formation of atomic-scale structures on silicon surfaces, but the fabrication of working devices-such as transistors with extremely short gate lengths, spin-based quantum computers and solitary dopant optoelectronic devices-requires the ability to position individual atoms in a silicon crystal with atomic precision. Here, we use a combination of scanning tunnelling microscopy and hydrogen-resist lithography to demonstrate a single-atom transistor in which an individual phosphorus dopant atom has been deterministically placed within an epitaxial silicon device architecture with a spatial accuracy of one lattice site. The transistor operates at liquid helium temperatures, and millikelvin electron transport measurements confirm the presence of discrete quantum levels in the energy spectrum of the phosphorus atom. We find a charging energy that is close to the ...Continue Reading

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Citations

Mar 20, 2013·ACS Applied Materials & Interfaces·Shanshan LiuMingwang Shao
Nov 21, 2012·Nano Letters·Amelia BarreiroLieven M K Vandersypen
Apr 11, 2013·Nano Letters·Fahd A MohiyaddinAndrea Morello
Mar 22, 2013·Nano Letters·J VerduijnS Rogge
Feb 26, 2013·Nano Letters·Mikaël KepenekianNicolás Lorente
Oct 17, 2012·ACS Nano·Willem F van DorpJeff Th M De Hosson
Jun 1, 2013·ACS Nano·Craig M PolleyMichelle Simmons
Mar 14, 2013·Nature Communications·B RocheX Jehl
Jul 24, 2013·Nature Communications·Chandramouli SubramaniamKenji Hata
Jul 4, 2012·Nature Nanotechnology·Enrico PratiTakahiro Shinada
Sep 3, 2013·Nature Nanotechnology·C SchirmE Scheer
Sep 18, 2013·Proceedings of the National Academy of Sciences of the United States of America·Barbara FreschF Remacle
Aug 6, 2014·Nature Nanotechnology·Ricardo GarciaElisa Riedo
Sep 24, 2014·Nanoscale Research Letters·Daniel W DrummSalvy P Russo
Jul 6, 2014·Nature Communications·Yun-Pil Shim, Charles Tahan
Sep 23, 2014·The Journal of Chemical Physics·Petra Ruth Kaprálová-ŽďánskáVladimír Špirko
Dec 17, 2015·Nano Letters·Alexandros EmborasJuerg Leuthold
Nov 17, 2015·ACS Nano·Joris G KeizerMichelle Y Simmons
Jan 10, 2016·The Journal of Chemical Physics·O WarschkowM Y Simmons
Aug 29, 2014·Scientific Reports·Daniel MoraruMichiharu Tabe
Jul 12, 2016·Applied Surface Science·Xiao DengRichard M Silver
Sep 26, 2015·Nanoscale Research Letters·Daniel MoraruMichiharu Tabe
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Mar 3, 2015·The Journal of Chemical Physics·Himangshu Prabal Goswami, Upendra Harbola
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Aug 24, 2016·Scientific Reports·Yu WangRajib Rahman
Oct 6, 2016·Nature Nanotechnology
Dec 7, 2016·Scientific Reports·Paul C SpruijtenburgFloris A Zwanenburg

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