A small-displacement sensor using total internal reflection theory and surface plasmon resonance technology for heterodyne interferometry.

Sensors
Shinn-Fwu Wang

Abstract

A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the small-displacement sensor. The theoretical displacement resolution of the small-displacement sensor can reach 0.45 nm. The sensor has some additional advantages, e.g., a simple optical setup, high resolution, high sensitivity and rapid measurement. Its feasibility is also demonstrated.

Citations

Dec 14, 2011·Sensors·Luis Alberto Vera-SalasEduardo Cabal-Yepez

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Methods Mentioned

BETA
liquid crystal display
Surface Plasmon Resonance
light ray

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