A technique for a nano-textured gapless microlens array using self-formation characteristics of anodic alumina

Nanoscale
Yong Min ParkYoung Ho Seo

Abstract

This paper presents a method to utilize the growth properties of anodic alumina possessing self-formation characteristics to fabricate a nano-textured microstructure and also introduces an application technique of the proposed method. The growth rate of anodic alumina, fabricated on aluminum surfaces, has a strong dependence on the intensity of the applied current density or electric field. The uniformity of the thickness of anodic alumina is determined by its electrical distribution characteristics. Accordingly, microscale structures can be fabricated using the growth rate deviation of anodic alumina. A patterned insulative layer is an important factor that determines the current density distribution property of a local region. A computational analysis and a verification experiment can verify this characteristic through the correlation between structural dimensional conditions and a cross-section of the fabricated anodic alumina. The anodic alumina fabricated by the verification experiment in this study had a swollen shape and a nano & micro complex structure, in which a nanoscale base pattern was formed on all bottom surface due to the process characteristics. Based on the advantages of the proposed process, evidenced by the ...Continue Reading

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Methods Mentioned

BETA
chemical etching
scanning electron microscopy
optical microscopy
electron microscopy

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