A water-processable cellulose-based resist for advanced nanofabrication

Nanoscale
Camilla DoreAgustín Mihi

Abstract

The ideal nanofabrication technique is one that allows the mass production of high resolution submicrometric features in a cost efficient and environmentally friendly fashion. A great step towards achieving this goal has been the development of nanoimprinting lithography, a procedure with tenths of nanometres resolution while being compatible with roll-to-roll manufacturing. However, an ecofriendly resist that can be efficiently combined with this process is still missing. In this work, we demonstrate the use of hydroxypropyl cellulose (HPC) as a biocompatible, biodegradable, and water processable resist for temperature assisted nanoimprint lithography (tNIL) by fabricating different photonic architectures. The cellulose derivative is easily patterned with submicrometric features with aspect ratios greater than 1 using an elastomeric stamp and a hot plate. Silicon photonic crystals and metal nanoparticle arrays are fabricated combining cellulose with traditional nanofrabrication processes such as spincasting, reactive ion etching and metal lift off. Furthermore, advanced nanofabrication possibilities are within reach by combining the HPC with traditional resists. In particular, poly(methyl methacrylate) and HPC stacks are easil...Continue Reading

References

Dec 29, 2006·Small·Vincent LinderGeorge M Whitesides
May 25, 2010·Advanced Materials·Jason J AmsdenFiorenzo G Omenetto
Jan 28, 2012·Chemical Society Reviews·Stefaan De KokerBruno G De Geest
Mar 25, 2014·Nature Nanotechnology·Sunghwan KimFiorenzo G Omenetto
Jan 25, 2017·Nanoscale·Djalal TracheVijay Kumar Thakur
Jan 13, 2018·Advanced Materials·Pau MoletAgustín Mihi
Jun 9, 2018·Nature Photonics·André EspinhaAgustín Mihi

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Citations

Jun 22, 2019·Advanced Materials·Se-Woong BaekEdward H Sargent

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Methods Mentioned

BETA
electron beam lithography
Atomic Force Microscopy
scanning electron microscopy

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