Active-edge planar radiation sensors

Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment
C J KenneyJ Morse

Abstract

Many systems in medicine, biology, high-energy physics, and astrophysics require large area radiation sensors. In most of these applications, minimizing the amount of dead area or dead material is crucial. We have developed a new type of silicon radiation sensor in which the device is active to within a few microns of the mechanical edge. Their perimeter is made by a plasma etcher rather than a diamond saw. Their edges can be defined and also passivated by growing, in an intermediate step, a field oxide on the side surfaces. In this paper, the basic architecture and results from a synchrotron beam test are presented.

Citations

Aug 4, 2015·Medical Physics·M PetaseccaA B Rosenfeld
Feb 17, 2021·Journal of Neural Engineering·Tiffany W HuangDaniel Palanker

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