Advances in Capacitive Micromachined Ultrasonic Transducers

Micromachines
Kevin BrennerButrus T Khuri-Yakub

Abstract

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.

References

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Citations

Jul 28, 2020·Micromachines·Rayyan ManwarKamran Avanaki
Nov 4, 2020·The Journal of the Acoustical Society of America·Ambre DaubaAnthony Novell
Mar 7, 2021·Sensors·Varshitha Yashvanth, Sazzadur Chowdhury
Mar 8, 2021·The Lancet Oncology·Hedvig HricakAndrew M Scott
Jun 3, 2021·Micromachines·Changde HeShengdong Zhang

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Methods Mentioned

BETA
chip
chips

Software Mentioned

PZFlex
ANSYS
LS
Philips
DYNA
Canon
COVENTOR
Sensant
COMSOL

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