AlN based piezoelectric micromirror

Optics Letters
Jian ShaoHongbin Yu

Abstract

Aiming to pursue a micromirror possessing many desired characteristics, such as linear control, low power consumption, fast response, and easy fabrication, a new piezoelectric actuation strategy is presented. Different from conventional piezoelectric actuation cases, we first propose using AlN film as the active layer for actuating the micromirror. Owing to its good CMOS compatible deposition and patterning techniques, the AlN based piezoelectric micromirror has been successfully fabricated with a modified silicon-on-insulator-based microelectromechanical system (MEMS) process. At the same time, various mirror movement modes operating at high frequencies and excellent linear relationship between the movement and the control signal both have been experimentally demonstrated.

References

Jun 13, 2015·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Tsuyoshi YokoyamaMasanori Ueda
Aug 10, 2017·Optics Express·Braden SmithYuzuru Takashima

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