Alternative post-processing on a CMOS chip to fabricate a planar microelectrode array.

Sensors
Francisco López-HuertaBlanca S Soto-Cruz

Abstract

We present an alternative post-processing on a CMOS chip to release a planar microelectrode array (pMEA) integrated with its signal readout circuit, which can be used for monitoring the neuronal activity of vestibular ganglion neurons in newborn Wistar strain rats. This chip is fabricated through a 0.6 μm CMOS standard process and it has 12 pMEA through a 4 × 3 electrodes matrix. The alternative CMOS post-process includes the development of masks to protect the readout circuit and the power supply pads. A wet etching process eliminates the aluminum located on the surface of the p+ -type silicon. This silicon is used as transducer for recording the neuronal activity and as interface between the readout circuit and neurons. The readout circuit is composed of an amplifier and tunable bandpass filter, which is placed on a 0.015 mm2 silicon area. The tunable bandpass filter has a bandwidth of 98 kHz and a common mode rejection ratio (CMRR) of 87 dB. These characteristics of the readout circuit are appropriate for neuronal recording applications.

References

Jul 27, 2005·IEEE Transactions on Bio-medical Engineering·Roy H OlssonKensall D Wise
Aug 3, 2010·Analytical and Bioanalytical Chemistry·Ian L JonesAndreas Hierlemann
Jan 1, 2009·Sensors·Ching-Liang DaiChienliu Chang
Jun 1, 2007·IEEE Transactions on Biomedical Circuits and Systems·W WattanapanitchR Sarpeshkar

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Citations

Jul 24, 2013·ACS Applied Materials & Interfaces·Despina FragouliAthanassia Athanassiou
Mar 18, 2021·Optics Express·Reza FatemiAli Hajimiri

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Methods Mentioned

BETA
biosensing
chip
chips
energy dispersive spectroscopy

Software Mentioned

pClamp
INAOE
Cadence Virtuoso
Origin
Clampfit
Zeiss LSM Image Examiner

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