An improved FIB sample preparation technique for site-specific plan-view specimens: A new cutting geometry

Ultramicroscopy
Chen LiRainer Abart

Abstract

Focused ion beam (FIB) sample preparation technique in plan-view geometry allows direct correlations of the atomic structure study via transmission electron microscopy with micrometer-scale property measurements. However, one main technical difficulty is that a large amount of material must be removed underneath the specimen. Furthermore, directly monitoring the milling process is difficult unless very large material volumes surrounding the TEM specimen site are removed. In this paper, a new cutting geometry is introduced for FIB lift-out sample preparation with plan-view geometry. Firstly, an "isolated" cuboid shaped specimen is cut out, leaving a "bridge" connecting it with the bulk material. Subsequently the two long sides of the "isolated" cuboid are wedged, forming a triangular prism shape. A micromanipulator needle is used for in-situ transfer of the specimen to a FIB TEM grid, which has been mounted parallel with the specimen surface using a simple custom-made sample slit. Finally, the grid is transferred to the standard FIB grid holder for final thinning with standard procedures. This new cutting geometry provides clear viewing angles for monitoring the milling process, which solves the difficulty of judging whether the...Continue Reading

Citations

Sep 6, 2018·Acta Crystallographica. Section A, Foundations and Advances·C LiR Abart
Nov 17, 2020·Journal of Microscopy·Junliang LiuChris R M Grovenor
Feb 16, 2021·Micron : the International Research and Review Journal for Microscopy·Tong LiuSunan Ding
Jul 16, 2021·Microscopy Research and Technique·Justinas Palisaitis
Sep 2, 2020·Journal of the American Chemical Society·Stella AslanoglouRoey Elnathan
Jul 6, 2018··Finn E. ChristensenMarcos Bavdaz

❮ Previous
Next ❯

Related Concepts

Related Feeds

Atrial Filbrillation

Atrial fibrillation refers to the abnormal heart rhythm characterized by rapid and irregular beating of the atria. Here is the latest research.

Atrial Fibrillation

Atrial fibrillation is a common arrhythmia that is associated with substantial morbidity and mortality, particularly due to stroke and thromboembolism. Here is the latest research.

Arrhythmia

Arrhythmias are abnormalities in heart rhythms, which can be either too fast or too slow. They can result from abnormalities of the initiation of an impulse or impulse conduction or a combination of both. Here is the latest research on arrhythmias.

Related Papers

Microscopy Research and Technique
Lucille A. GiannuzziF A Stevie
Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
Herman Carlo FlorescaMoon J Kim
Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
Tae-Hoon KimCheol-Woong Yang
© 2022 Meta ULC. All rights reserved