An optical configuration for fastidious STEM detector calibration and the effect of the objective-lens pre-field

Journal of Microscopy
L JonesP D Nellist

Abstract

In the scanning transmission electron microscope, an accurate knowledge of detector collection angles is paramount in order to quantify signals on an absolute scale. Here we present an optical configuration designed for the accurate measurement of collection angles for both image-detectors and energy-loss spectrometers. By deflecting a parallel electron beam, carefully calibrated using a diffraction pattern from a known material, we can directly observe the projection-distortion in the post-specimen lenses of probe-corrected instruments, the 3-fold caustic when an image-corrector is fitted, and any misalignment of imaging detectors or spectrometer apertures. We also discuss for the first time, the effect that higher-order aberrations in the objective-lens pre-field has on such an angle-based detector mapping procedure.

References

Feb 1, 1988·Journal of Electron Microscopy Technique·T MalisR F Egerton
Jun 4, 2008·Physical Review Letters·James M LeBeauSusanne Stemmer
Aug 26, 2011·Ultramicroscopy·Andreas RosenauerStephan Lutgen
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Nov 13, 2012·Ultramicroscopy·Hadas Katz-BoonJoanne Etheridge
Oct 31, 2013·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Ryo IshikawaStephen J Pennycook
Feb 1, 2015·Microscopy·Shunsuke YamashitaKoji Kimoto
Sep 1, 2015·Ultramicroscopy·G T MartinezP D Nellist
Nov 28, 2015·Physical Review Letters·Yung-Chang LinKazu Suenaga
Dec 22, 2015·Ultramicroscopy·Florian F KrauseAndreas Rosenauer
Nov 17, 2016·Scientific Reports·Knut Müller-CasparyPavel Potapov

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Citations

Sep 5, 2020·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Gary W PatersonMagnus Nord

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