Anisotropic etching of SiC whiskers

Nano Letters
Goknur Z CambazVadim G Lutsenko

Abstract

We have demonstrated a method of producing nanoplatelets or complex well-ordered nanostructures from silicon carbide (SiC) whiskers. Preferential etching of SiC whiskers in a mixture of hydrofluoric and nitric acids (3:1 ratio) at 100 degrees C results in the selective removal of cubic SiC and the formation of complex structures resembling a pagoda architecture. Possible mechanisms governing selective etching are discussed. Reproducible results on SiC whiskers manufactured in different laboratories suggest that the self-patterning phenomena are common in SiC whiskers, and the same electroless etching procedure can be used to synthesize various complex nanostructures from more conventional nano- and microscale objects for use as building blocks in the fabrication of sensors, cellular probes, and electronic, optoelectronic, electromechanical, and other devices.

References

Jul 5, 2005·Science·Lidong QinChad A Mirkin

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Citations

Jul 19, 2011·Nanoscale Research Letters·Yong LiZhi-Ming Lin
Jun 11, 2016·ACS Applied Materials & Interfaces·Alexander T TesfayeThierry Djenizian
Mar 9, 2018·Angewandte Chemie·Mohamed AlhabebYury Gogotsi
Nov 20, 2018·Advanced Materials·Kanit Hantanasirisakul, Yury Gogotsi
Sep 11, 2010·Nanotechnology·Cuilan WuJianghua Chen
Mar 21, 2020·Nanomaterials·Gyula KárolyházyÁdám Gali
May 24, 2016·Nanoscale·Patrick UrbankowskiYury Gogotsi
Dec 1, 2011·Nanoscale Research Letters·Alan MengZhenjiang Li
Oct 12, 2018·Chemical Society Reviews·Xu XiaoYury Gogotsi
Jul 31, 2020·Proceedings of the National Academy of Sciences of the United States of America·Fu ZhangMauricio Terrones
Feb 24, 2015·ACS Applied Materials & Interfaces·Hao ZhuangXin Jiang
Dec 10, 2014·Accounts of Chemical Research·Michael Naguib, Yury Gogotsi
Jan 7, 2021·ACS Applied Materials & Interfaces·Xiaoxiao LiWeiyou Yang

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