Anti-stiction coating for mechanically tunable photonic crystal devices

Optics Express
M PetruzzellaAndrea Fiore

Abstract

A method to avoid the stiction failure in nano-electro-opto-mechanical systems has been demonstrated by coating the system with an anti-stiction layer of Al2O3 grown by atomic layer deposition techniques. The device based on a double-membrane photonic crystal cavity can be reversibly operated from the pull-in back to its release status. This enables to electrically switch the wavelength of a mode over ~50 nm with a potential modulation frequency above 2 MHz. These results pave the way to reliable nano-mechanical sensors and optical switches.

References

Jul 1, 2010·Optics Express·Ian W FrankMarko Loncar
Dec 22, 2017·Nature Communications·Žarko ZobenicaAndrea Fiore

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