Assessing the composition of hetero-epitaxial islands via morphological analysis: an analytical model matching GeSi/Si(001) data

Journal of Physics. Condensed Matter : an Institute of Physics Journal
R GattiL Miglio

Abstract

A simple, but still three-dimensional, model describing the morphological stability of realistic SiGe islands on Si(001) is presented. The experimental evolution toward steeper islands with volume can be predicted for any average composition. Despite the use of elastic theory for stress relaxation under the assumption of a uniform SiGe distribution, and of a common mean surface energy of the faceted islands, the model seems to capture the essence of the energetic balance determining the morphological evolution with volume, with no fitting parameters. This is suggested by close comparison with molecular beam epitaxy data at three different temperatures (i.e. compositions). The good agreement also allows for interpreting the minor scattering of experimental data with temperature and provides a reliable tool for extracting the average Ge content from standard atomic force microscopy analysis.

References

Aug 20, 1990·Physical Review Letters·Y MoM G Lagally
Jul 11, 1994·Physical Review Letters·F K LeGouesR M Tromp
Dec 17, 2004·Physical Review Letters·F MontalentiLeo Miglio
Feb 1, 2008·Physical Review Letters·A MarzegalliLeo Miglio
May 7, 2009·Nanotechnology·Jeremy T RobinsonOscar D Dubon

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Citations

May 30, 2015·Journal of Physics. Condensed Matter : an Institute of Physics Journal·L PersichettiA Balzarotti

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