Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications

ACS Applied Materials & Interfaces
Shannon C RihaAlex B F Martinson

Abstract

Manganese sulfide (MnS) thin films were synthesized via atomic layer deposition (ALD) using gaseous manganese bis(ethylcyclopentadienyl) and hydrogen sulfide as precursors. At deposition temperatures ≤150 °C phase-pure γ-MnS thin films were deposited, while at temperatures >150 °C, a mixed phase consisting of both γ- and α-MnS resulted. In situ quartz crystal microbalance (QCM) studies validate the self-limiting behavior of both ALD half-reactions and, combined with quadrupole mass spectrometry (QMS), allow the derivation of a self-consistent reaction mechanism. Finally, MnS thin films were deposited on copper foil and tested as a Li-ion battery anode. The MnS coin cells showed exceptional cycle stability and near-theoretical capacity.

References

Nov 26, 2003·Angewandte Chemie·Markku Leskelä, Mikko Ritala
Sep 10, 2004·Journal of the American Chemical Society·Xiang V ZhangHeinrich D Holland
Dec 2, 2009·Chemical Reviews·Steven M George
May 6, 2010·The Review of Scientific Instruments·Neil P DasguptaFritz B Prinz
Jun 21, 2011·Chemical Communications : Chem Comm·Qiwei TianJunqing Hu
Oct 2, 2012·The Review of Scientific Instruments·Shannon C RihaAlex B F Martinson
Jan 8, 2014·ACS Applied Materials & Interfaces·Juan Beltran-HuaracGerardo Morell
Jan 13, 2015·Accounts of Chemical Research·Neil P DasguptaAlex B F Martinson

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Citations

Aug 26, 2016·ACS Applied Materials & Interfaces·Muhammad Sufyan JavedXiao Gu
Jan 25, 2017·ACS Applied Materials & Interfaces·Shannon C RihaAlex B F Martinson
Aug 7, 2018·Chemistry : a European Journal·Jue WangXinwei Wang
Jun 29, 2018·Chemical Reviews·Jia DingDavid Mitlin

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