Beam damage by the induced electric field in transmission electron microscopy

Micron : the International Research and Review Journal for Microscopy
Nan Jiang

Abstract

Electric fields can be induced by electron irradiation of insulating thin film materials. In this work, the electric fields under a broad beam illumination in transmission electron microscopy (TEM) are analyzed for insulating samples. Some damage phenomena observed can be interpreted by the mechanism of damage by the induced electric field (DIEF). For broad-beam illumination in an ultra-thin specimen, the electric field near the center of the illumination may not be strong, but at the periphery of the illumination the electric field can be significant. Therefore, damage may be easily observed in these regions rather than at the center of the illumination. For a beam which is broad compared to the specimen thickness, e.g. 100∼1000nm, a strong electric field pointing inward into the specimen near the surface region may result in cation diffusion into the specimen and/or anion diffusion out to the surface region. Meanwhile, a strong electric field perpendicular to the beam direction near the edge of the illumination may attract anions into the illuminated region, but eject cations to the periphery. For a wedge-shaped specimen, the electric field points inward into thicker region, driving cations toward the thicker region, while at...Continue Reading

References

Aug 23, 2012·Ultramicroscopy·R F Egerton
Nov 20, 2013·Micron : the International Research and Review Journal for Microscopy·Wilson Merchan-MerchanZachary Moorhead-Rosenberg
Dec 20, 2015·Reports on Progress in Physics·Nan Jiang

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Citations

Oct 18, 2016·Journal of Occupational and Environmental Hygiene·Joannie MartinGilles L'Espérance
May 13, 2021·Accounts of Chemical Research·Karen C BustilloAndrew M Minor
Jul 31, 2021·Chemical Reviews·Aoon RizviJoseph P Patterson
May 11, 2019·Nano Letters·Cristina CordobaKaren L Kavanagh

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