Building Structures Atom by Atom via Electron Beam Manipulation

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Ondrej DyckStephen Jesse

Abstract

Building materials from the atom up is the pinnacle of materials fabrication. Until recently the only platform that offered single-atom manipulation was scanning tunneling microscopy. Here controlled manipulation and assembly of a few atom structures are demonstrated by bringing together single atoms using a scanning transmission electron microscope. An atomically focused electron beam is used to introduce Si substitutional defects and defect clusters in graphene with spatial control of a few nanometers and enable controlled motion of Si atoms. The Si substitutional defects are then further manipulated to form dimers, trimers, and more complex structures. The dynamics of a beam-induced atomic-scale chemical process is captured in a time-series of images at atomic resolution. These studies suggest that control of the e-beam-induced local processes offers the next step toward atom-by-atom nanofabrication, providing an enabling tool for the study of atomic-scale chemistry in 2D materials and fabrication of predefined structures and defects with atomic specificity.

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Citations

Jun 12, 2018·Advanced Materials·Mark H RummeliZhongfan Liu
Sep 12, 2019·Scientific Reports·Alexandru Ionut Chirita MihailaJani Kotakoski
Oct 3, 2020·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Xiaoxu ZhaoStephen J Pennycook
Feb 12, 2020·Ultramicroscopy·Ondrej DyckAndrew R Lupini
Feb 19, 2021·ACS Nano·Derek S WangPrineha Narang
Jul 17, 2021·ACS Nano·Sergei V KalininRama K Vasudevan
Dec 19, 2020·Nano Letters·David B LingerfeltBobby G Sumpter

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