Cascade optical coherence tomography (C-OCT)

Optics Express
Di XuJannick P Rolland

Abstract

Significant advances for optical systems in terms of both performance and packaging are enabled by freeform optical components. Yet, surface form metrology for freeform optics remains a challenge. We developed and investigated a point-cloud cascade optical coherence tomography (C-OCT) technique to address this metrology challenge. The mathematical framework for the working principle of C-OCT is presented. A novel detection scheme is developed to enable high-speed measurements. Experimental results validate the C-OCT technique with the prototype setup demonstrating single-point precision of ±26 nm (∼λ/24 at the He-Ne wavelength), paving the way towards full surface measurements on freeform optical components.

References

Dec 12, 2007·Applied Optics·Zhilin HuAndrew M Rollins
Dec 19, 2007·Optics Letters·Zhilin Hu, Andrew M Rollins
Dec 18, 2010·Optics Express·Kye-Sung LeeJannick P Rolland
Apr 4, 2014·Journal of Biomedical Optics·Patrice TankamJannick P Rolland
Sep 18, 2015·Journal of Biomedical Optics·Jinxin HuangJannick P Rolland
Dec 10, 2017·Optics Express·Simone SorgatoFabian Duerr
May 3, 2018·Optics Express·Jianing YaoJannick P Rolland
Sep 1, 2018·Light, Science & Applications·Jacob ReimersJannick P Rolland
Nov 7, 2019·Optics Express·Aaron BauerJannick P Rolland
Dec 28, 2019·Optics Express·Changsik YoonJannick P Rolland

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