Characterizing nanoscale scanning probes using electron microscopy: A novel fixture and a practical guide

The Review of Scientific Instruments
Tevis D B JacobsRobert W Carpick

Abstract

The nanoscale geometry of probe tips used for atomic force microscopy (AFM) measurements determines the lateral resolution, contributes to the strength of the tip-surface interaction, and can be a significant source of uncertainty in the quantitative analysis of results. While inverse imaging of the probe tip has been used successfully to determine probe tip geometry, direct observation of the tip profile using electron microscopy (EM) confers several advantages: it provides direct (rather than indirect) imaging, requires fewer algorithmic parameters, and does not require bringing the tip into contact with a sample. In the past, EM-based observation of the probe tip has been achieved using ad hoc mounting methods that are constrained by low throughput, the risk of contamination, and repeatability issues. We report on a probe fixture designed for use in a commercial transmission electron microscope that enables repeatable mounting of multiple AFM probes as well as a reference grid for beam alignment. This communication describes the design, fabrication, and advantages of this probe fixture, including full technical drawings for machining. Further, best practices are discussed for repeatable, non-destructive probe imaging. Finall...Continue Reading

References

Oct 20, 2001·Science·X D CuiS M Lindsay
Feb 2, 2006·Ultramicroscopy·Malgorzata Kopycinska-MüllerDonna C Hurley
Mar 21, 2007·Ultramicroscopy·Koo-Hyun Chung, Dae-Eun Kim
Oct 15, 2008·Physical Review Letters·Bernd Gotsmann, Mark A Lantz
Feb 2, 2010·Nature Nanotechnology·Harish BhaskaranKumar Sridharan
Jun 26, 2010·ACS Nano·Jingjing LiuKevin T Turner
Jun 18, 2014·Ultramicroscopy·Erin E FlaterCharles A Clifford
Jan 1, 1997·Journal of Research of the National Institute of Standards and Technology·J S Villarrubia

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Citations

Jul 30, 2019·Beilstein Journal of Nanotechnology·Zahra AbooalizadehPhilip Egberts
Dec 7, 2018·The Review of Scientific Instruments·Erin E FlaterTevis D B Jacobs
Oct 31, 2017·ACS Nano·Yu Kyoung Ryu ChoArmin W Knoll
Sep 30, 2017·ACS Applied Materials & Interfaces·Jingjing LiuKevin T Turner
Jul 28, 2018·ACS Applied Materials & Interfaces·Abhijeet GujratiTevis D B Jacobs

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