Circuit fabrication at 17 nm half-pitch by nanoimprint lithography

Nano Letters
Gun-Young JungR Stanley Williams

Abstract

High density metal cross bars at 17 nm half-pitch were fabricated by nanoimprint lithography. Utilizing the superlattice nanowire pattern transfer technique, a 300-layer GaAs/AlGaAs superlattice was employed to produce an array of 150 Si nanowires (15 nm wide at 34 nm pitch) as an imprinting mold. A successful reproduction of the Si nanowire pattern was demonstrated. Furthermore, a cross-bar platinum nanowire array with a cell density of approximately 100 Gbit/cm(2) was fabricated by two consecutive imprinting processes.

References

Aug 19, 2000·Science·C P CollierJ R Heath
Mar 15, 2003·Science·Nicholas A MeloshJames R Heath
Feb 9, 2005·Langmuir : the ACS Journal of Surfaces and Colloids·Gun-Young JungR Stanley Williams

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Citations

Sep 3, 2009·Nano Letters·Mark Schvartzman, Shalom J Wind
Jul 26, 2008·Nature Nanotechnology·J Joshua YangR Stanley Williams
Mar 15, 2014·Nanoscale Research Letters·Sheng-Qing ZhuXiao-Yang Zhang
Nov 15, 2006·The Journal of Chemical Physics·Daniel P Fogarty, S Alex Kandel
Apr 25, 2012·Annual Review of Analytical Chemistry·Reginald M Penner
Jul 20, 2011·Neural Networks : the Official Journal of the International Neural Network Society·Jung Hoon Lee
Jan 28, 2009·Proceedings of the National Academy of Sciences of the United States of America·Julien BorghettiR Stanley Williams
Nov 9, 2016·Methodist DeBakey Cardiovascular Journal·Cihan YilmazAhmed Busnaina
Jan 24, 2007·Journal of Computational Chemistry·Hassan Sabzyan, Davood Farmanzadeh
Apr 23, 2008·Nanotechnology·Zhiyong LiR Stanley Williams
May 9, 2009·Nanotechnology·J Joshua YangR Stanley Williams
May 8, 2009·Nanotechnology·Adam C Cabe, Shamik Das
Aug 5, 2009·Nanotechnology·Hyejung ChoiHyunsang Hwang
Sep 26, 2009·Nanotechnology·Pascal O VontobelR Stanley Williams
Apr 9, 2010·Nature·Julien BorghettiR Stanley Williams
Oct 15, 2010·Nanoscale·G U Kulkarni, B Radha
Dec 21, 2006·Lab on a Chip·Edwin T Carlen, Albert van den Berg
May 19, 2011·Nanotechnology·Hongyan Gu, Shiping Zhu
Mar 4, 2011·Optics Express·Chia-Ching LiangChun-Hung Lin
Jun 30, 2009·Molecular BioSystems·David Papapostolou, Stefan Howorka
Feb 14, 2017·Nano Convergence·Steven Barcelo, Zhiyong Li
Feb 10, 2009·Nano Letters·Hien Duy TongAlbert van den Berg
Jul 5, 2008·Accounts of Chemical Research·James R Heath
Mar 3, 2010·Nano Letters·Sung Hyun JoWei Lu
Oct 8, 2008·Nano Letters·Wei WuR Stanley Williams
Feb 21, 2019·ACS Applied Materials & Interfaces·Kyunghwan KimJungwoo Oh

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