Circular pyramidal kirigami microscanner with millimeter-range low-power lens drive

Optics Express
Masaaki Hashimoto, Yoshihiro Taguchi

Abstract

This paper proposes an electrothermally-actuated circular pyramidal kirigami microscanner with a millimeter-range low-power lens drive for endoscopic biomedical applications. A variation of Japanese origami art, kirigami involves creation of out-of-plane structures by paper cutting and folding. The proposed microscanner is composed of freestanding kirigami film on which the spiral-curved thermal bimorphs are strategically placed. The kirigami microscanner is electrothermally transformed into an out-of-plane circular multistep pyramid by Joule heating. The circular pyramidal kirigami microscanner on a small footprint of 4.5 mm × 4.5 mm was fabricated by microelectromechanical system processes. A large four-step pyramidal actuation was successfully demonstrated, and a large 1.1-mm lens travel range at only 128 mW was achieved.

References

Nov 30, 2011·Progress in Biophysics and Molecular Biology·Halina AbramczykRadzisław Kordek
Jan 29, 2016·Biomedical Optics Express·Soroush MehravarKhanh Kieu
Apr 14, 2016·IEEE Transactions on Bio-medical Engineering·Niranchan PaskaranandavadivelLeo K Cheng
Jan 19, 2018·Sensors·Masaaki Hashimoto, Yoshihiro Taguchi
Oct 28, 2019·Surgical Oncology·Tatjana Tamara KönigOliver J Muensterer
Dec 8, 2019·Photodiagnosis and Photodynamic Therapy·Waseem JerjesColin Hopper
Mar 4, 2020·Optics Express·Rui LiXiao Zhang

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