Clamp-Tapering Increases the Quality Factor of Stressed Nanobeams

Nano Letters
Mohammad J BereyhiTobias J Kippenberg

Abstract

Stressed nanomechanical resonators are known to have exceptionally high quality factors ( Q) due to the dilution of intrinsic dissipation by stress. Typically, the amount of dissipation dilution and thus the resonator Q is limited by the high mode curvature region near the clamps. Here we study the effect of clamp geometry on the Q of nanobeams made of high-stress Si3N4. We find that tapering the beam near the clamps, thus locally increasing the stress, leads to an increased Q of MHz-frequency low order modes due to enhanced dissipation dilution. Contrary to recent studies of tethered-membrane resonators, we find that widening the clamps leads to a decreased Q despite increased stress in the beam bulk. The tapered-clamping approach has practical advantages compared to the recently developed "soft-clamping" technique, as it enhances the Q of the fundamental mode and can be implemented without increasing the device size.

References

Apr 7, 2010·Physical Review Letters·D J WilsonH J Kimble
Sep 28, 2010·Physical Review Letters·Quirin P UnterreithmeierJörg P Kotthaus
Feb 27, 2016·Physical Review Letters·R W PetersonC A Regal
Apr 23, 2016·Physical Review Letters·R A NorteS Gröblacher
Apr 1, 2017·Nano Letters·Amir Hossein GhadimiTobias J Kippenberg
Jun 13, 2017·Nature Nanotechnology·Y TsaturyanA Schliesser
Apr 14, 2018·Science·A H GhadimiT J Kippenberg
Nov 2, 2018·Nature·Massimiliano RossiAlbert Schliesser

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Citations

Apr 29, 2020·Nanomaterials·Vassil TzanovNúria Barniol
Feb 1, 2020·Physical Review Letters·S A FedorovT J Kippenberg
Oct 3, 2021·Nature Communications·Dennis HøjUlrik Lund Andersen

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