Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures

Analytical Chemistry
Robert WenischMatthias Krause

Abstract

A new cluster tool for in situ real-time processing and depth-resolved compositional, structural and optical characterization of thin films at temperatures from -100 to 800 °C is described. The implemented techniques comprise magnetron sputtering, ion irradiation, Rutherford backscattering spectrometry, Raman spectroscopy, and spectroscopic ellipsometry. The capability of the cluster tool is demonstrated for a layer stack MgO/amorphous Si (∼60 nm)/Ag (∼30 nm), deposited at room temperature and crystallized with partial layer exchange by heating up to 650 °C. Its initial and final composition, stacking order, and structure were monitored in situ in real time and a reaction progress was defined as a function of time and temperature.

References

Jun 17, 2009·Nano Letters·Francisco J LopezLincoln J Lauhon
Oct 30, 2015·Chemical Reviews·Lee A WeinsteinGang Chen

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