PMID: 16529124Mar 15, 2006Paper

CMUTS with dual-electrode structure for improved transmit and receive performance

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Rasim O GuldikenF Levent Degertekin

Abstract

In this paper, we introduce capacitive micro-machined ultrasonic transducers (CMUTs) with electrically isolated multiple electrodes embedded in the same silicon nitride CMUT membrane. Some of the advantages of this structure are demonstrated using a dual-electrode CMUT with separate transmit and receive electrodes as an example. By locating the transmit electrodes near the edges of a rectangular CMUT membrane, the stable displacement range, hence the maximum pressure amplitude during transmit mode is increased without collapsing the membrane when operated within static collapse voltage range. In the receive mode, the center receive electrode is brought closer to the substrate by biasing the side electrodes, and a higher electromechanical transformer ratio is obtained at low direct current (DC) bias. Therefore, dual-electrode CMUT has an effectively larger gap as compared to conventional CMUT during transmit, and it has an effectively smaller gap during receive. Demonstrative experiments are performed on dual-electrode CMUTs with rectangular membranes with different side and center electrode sizes for transmit and receive measurements. By using the two 4-microm wide side electrodes and an 8-microm wide center electrode on a 20-m...Continue Reading

References

May 15, 2003·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Goksen G YaraliogluButrus T Khuri-Yakub
Oct 17, 2003·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Baris BayramButrus T Khuri-Yakub
Dec 20, 2003·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Omer OralkanButrus T Khuri-Yakub
Jul 13, 2004·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Jeff McLean, F Levent Degertekin
Dec 17, 2004·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Shiwei ZhouJohn Hossack
Apr 2, 2005·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Baris BayramButrus T Khuri-Yakub
Feb 5, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·I LadabaumB T Khuri-Yakub
Feb 5, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·A BozkurtB T Khuri-Yakub

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Citations

Nov 1, 2012·Sensors·Onursal OnenNathan D Gallant
Nov 28, 2012·Advanced Healthcare Materials·Umut Atakan GurkanUtkan Demirci
Nov 16, 2011·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Selim OlcumAbdullah Atalar
Dec 5, 2014·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Toby XuF Degertekin
Jun 22, 2012·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·F Yalçin YamanerAbdullah Atalar
Oct 26, 2013·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Sarp SatirF Levent Degertekin
Oct 26, 2013·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Wei YouRobert Rohling
Jan 30, 2014·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Gokce GurunF Levent Degertekin
Feb 2, 2012·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Sarp Satir, F Levent Degertekin
Aug 29, 2014·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Donghwan KimNeal A Hall
May 15, 2015·IEEE Transactions on Biomedical Circuits and Systems·Parisa BehnamfarShahriar Mirabbasi
Nov 7, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Serena H WongButrus T Khuri-Yakub
Feb 14, 2009·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Xuefeng ZhuangButrus T Khuri-Yakub
Nov 7, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Rasim O GuldikenF Levent Degertekin
Jul 4, 2009·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Rasim O GuldikenF Levent Degertekin
Oct 16, 2015·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Sarp Satir, F Levent Degertekin
Apr 22, 2016·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Yuanyu YuMang I Vai
May 5, 2021·The Journal of the Acoustical Society of America·Goksen G YaraliogluAyhan Bozkurt

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