Comb-referenced frequency-sweeping interferometry for precisely measuring large stepped structures

Applied Optics
Weipeng ZhangYan Li

Abstract

A precise 3D surface measurement method for large stepped structures without height ambiguity is proposed based on optical-frequency-comb-referenced frequency-sweeping interferometry and Fourier-transformed fractional phase retrieval. Unlike other interferometry that depends on the absolute phase value for several certain wavelengths, this method obtains results from the phase change during frequency sweeping and thus remains free from the confined non-ambiguity range. By reference to an optical frequency comb, the relative uncertainty from the tunable laser frequency was reduced by three orders of magnitude, and the sweeping frequency range can be precisely determined. Besides, the fractional phase can be rapidly retrieved in only one step using a Fourier transform method, with advantages of high accuracy and immunity to light intensity fluctuation and mechanical vibration noise. Samples of step heights from 1 μm to 1 mm were measured, and the standard uncertainty was 45 nm. This permits applications such as quality assurance in microelectronics production and micro-electro-mechanical system (MEMS) manufacture.

References

Mar 15, 2002·Nature·Th UdemT W Hänsch
Dec 1, 1983·Applied Optics·W W Macy
Sep 1, 1986·Applied Optics·H KikutaR Nagata
Jul 1, 1997·Applied Optics·S Kuwamura, I Yamaguchi
May 1, 1988·Optics Letters·R DändlikerD Prongué

❮ Previous
Next ❯

Related Concepts

Trending Feeds

COVID-19

Coronaviruses encompass a large family of viruses that cause the common cold as well as more serious diseases, such as the ongoing outbreak of coronavirus disease 2019 (COVID-19; formally known as 2019-nCoV). Coronaviruses can spread from animals to humans; symptoms include fever, cough, shortness of breath, and breathing difficulties; in more severe cases, infection can lead to death. This feed covers recent research on COVID-19.

Blastomycosis

Blastomycosis fungal infections spread through inhaling Blastomyces dermatitidis spores. Discover the latest research on blastomycosis fungal infections here.

Nuclear Pore Complex in ALS/FTD

Alterations in nucleocytoplasmic transport, controlled by the nuclear pore complex, may be involved in the pathomechanism underlying multiple neurodegenerative diseases including Amyotrophic Lateral Sclerosis and Frontotemporal Dementia. Here is the latest research on the nuclear pore complex in ALS and FTD.

Applications of Molecular Barcoding

The concept of molecular barcoding is that each original DNA or RNA molecule is attached to a unique sequence barcode. Sequence reads having different barcodes represent different original molecules, while sequence reads having the same barcode are results of PCR duplication from one original molecule. Discover the latest research on molecular barcoding here.

Chronic Fatigue Syndrome

Chronic fatigue syndrome is a disease characterized by unexplained disabling fatigue; the pathology of which is incompletely understood. Discover the latest research on chronic fatigue syndrome here.

Evolution of Pluripotency

Pluripotency refers to the ability of a cell to develop into three primary germ cell layers of the embryo. This feed focuses on the mechanisms that underlie the evolution of pluripotency. Here is the latest research.

Position Effect Variegation

Position Effect Variagation occurs when a gene is inactivated due to its positioning near heterochromatic regions within a chromosome. Discover the latest research on Position Effect Variagation here.

STING Receptor Agonists

Stimulator of IFN genes (STING) are a group of transmembrane proteins that are involved in the induction of type I interferon that is important in the innate immune response. The stimulation of STING has been an active area of research in the treatment of cancer and infectious diseases. Here is the latest research on STING receptor agonists.

Microbicide

Microbicides are products that can be applied to vaginal or rectal mucosal surfaces with the goal of preventing, or at least significantly reducing, the transmission of sexually transmitted infections. Here is the latest research on microbicides.