Compact gas cell integrated with a linear variable optical filter

Optics Express
N Pelin AyerdenReinoud F Wolffenbuttel

Abstract

A miniaturized methane (CH<sub>4</sub>) sensor based on nondispersive infrared absorption is realized in MEMS technology. A high level of functional integration is achieved by using the resonance cavity of a linear variable optical filter (LVOF) also as a gas absorption cell. For effective detection of methane at λ = 3.39 µm, an absorption path length of at least 5 mm is required. Miniaturization therefore necessitates the use of highly reflective mirrors and operation at the 15th-order mode with a resonator cavity length of 25.4 µm. The conventional description of the LVOF in terms of the Fabry-Perot resonator is inadequate for analyzing the optical performance at such demanding boundary conditions. We demonstrate that an approach employing the Fizeau resonator is more appropriate. Furthermore, the design and fabrication in a CMOS-compatible microfabrication technology are described and operation as a methane sensor is demonstrated.

References

Sep 15, 1985·Applied Optics·G Hernandez
May 2, 2008·Applied Optics·Angela PiegariAnna Krasilnikova Sytchkova
Nov 28, 2008·Applied Optics·Semen GrabarnikReinoud F Wolffenbuttel
Mar 19, 2007·Optics Express·Semen GrabarnikGleb Vdovin
Feb 1, 1968·Applied Optics·R BünnagelK Steiner
Sep 1, 1970·Applied Optics·P Langenbeck
Mar 15, 1981·Applied Optics·J AltmannC Weitkamp
Oct 4, 2013·Journal of Biomedical Optics·Denis D ArslanovFrans J M Harren
Nov 18, 2014·Applied Optics·N Pelin AyerdenHakan Urey

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Citations

Oct 3, 2019·Sensors·Xiaoning JiaGunther Roelkens
Nov 2, 2017·Applied Optics·Victoria A Carey, Mark S Mirotznik
Mar 10, 2018·Optics Express·Peng JiDuk-Yong Choi

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