Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers.

Sensors
Mohd Zahid AnsariBooun Bang

Abstract

Arrays of microcantilevers are increasingly being used as physical, biological, and chemical sensors in various applications. To improve the sensitivity of microcantilever sensors, this study analyses and compares the deflection and vibration characteristics of rectangular and trapezoidal profile microcantilevers. Three models of each profile are investigated. The cantilevers are analyzed for maximum deflection, fundamental resonant frequency and maximum stress. The surface stress is modelled as in-plane tensile force applied on the top edge of the microcantilevers. A commercial finite element analysis software ANSYS is used to analyze the designs. Results show paddled trapezoidal profile microcantilevers have better sensitivity.

References

Jul 18, 2002·Proceedings of the National Academy of Sciences of the United States of America·Rachel McKendryChristoph Gerber
Jul 30, 2005·Ultramicroscopy·M CallejaA Boisen
Jun 11, 2008·Nanotechnology·C Raman SuriGajendra S Shekhawat
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Citations

Jan 1, 2010·Sensors·Mohd Zahid Ansari, Chongdu Cho
Feb 22, 2012·Sensors·Ali ShokuhfarSalman Ebrahimi-Nejad
Dec 14, 2011·Nanotechnology·Johann MertensJavier Tamayo
Dec 31, 2020·Micromachines·Muhammad Umair NathaniArezoo Emadi

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Methods Mentioned

BETA
biosensing
biosensors
biosensor

Software Mentioned

ANSYS
ANSYS Multiphysics

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