Comparison of Si and Ge low-loss spectra to interpret the Ge contrast in EFTEM images of Si(1-x) Ge(x) nanostructures

Micron : the International Research and Review Journal for Microscopy
R PantelF D Tichelaar

Abstract

Recently, an EFTEM imaging method, exploiting the inelastically scattered electrons in the 60-90eV energy range, was proposed to visualise Ge in SiGe alloys [Pantel, R., Jullian, S., Delille, D., Dutartre, D., Chantre, A., Kermarrec, O., Campidelli, Y., Kwakman, L.F.T.Z., 2003. Inelastic electron scattering observation using Energy Filtered Transmission Electron Microscopy for silicon-germanium nanostructures imaging. Micron 34, 239-247]. This method was proven to be highly more efficient in terms of noise, drift and exposure time than the imaging of the weak and delayed ionization GeL2,3 edge at 1236eV. However, the physical phenomenon behind this Ge contrast was not clearly identified. In this work, we explain the origin of this Ge contrast, by comparing in details EELS low-loss spectra (<100eV) recorded from pure Si and Ge crystals. High resolved low-loss experiments are performed using analytical Field Emission Gun Transmission Electron Microscopes fitted or not with a monochromator. Low-loss spectra (LLS) are then deconvoluted from elastic/quasi-elastic and plural scattering effects. The deconvolution procedure is established from Si spectra recorded with the monochromated machine. The absence of second plasmon and the mea...Continue Reading

References

Oct 10, 1998·Journal of Microscopy·A D DorneichM Rühle
Aug 5, 2003·Micron : the International Research and Review Journal for Microscopy·R PantelL F T Z Kwakman
Jan 5, 2005·Micron : the International Research and Review Journal for Microscopy·Koji KimotoFerdinand Hofer
Mar 23, 2006·Micron : the International Research and Review Journal for Microscopy·M Stöger-PollachH W Zandbergen

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Citations

Apr 9, 2008·Micron : the International Research and Review Journal for Microscopy·M Stöger-Pollach
Apr 3, 2007·Ultramicroscopy·M Stöger-Pollach, P Schattschneider
Jun 12, 2009·Ultramicroscopy·Jucheol ParkGyeong-Su Park

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