Controllable electrical and physical breakdown of poly-crystalline silicon nanowires by thermally assisted electromigration

Scientific Reports
Jun-Young ParkYang-Kyu Choi

Abstract

The importance of poly-crystalline silicon (poly-Si) in semiconductor manufacturing is rapidly increasing due to its highly controllable conductivity and excellent, uniform deposition quality. With the continuing miniaturization of electronic components, low dimensional structures such as 1-dimensional nanowires (NWs) have attracted a great deal of attention. But such components have a much higher current density than 2- or 3-dimensional films, and high current can degrade device lifetime and lead to breakdown problems. Here, we report on the electrical and thermal characteristics of poly-Si NWs, which can also be used to control electrical and physical breakdown under high current density. This work reports a controllable catastrophic change of poly-Si NWs by thermally-assisted electromigration and underlying mechanisms. It also reports the direct and real time observation of these catastrophic changes of poly-Si nanowires for the first time, using scanning electron microscopy.

References

Jul 19, 2005·Nature Materials·Frank W DelrioMartin L Dunn
Mar 4, 2008·Nano Letters·Guo-Jun ZhangN Balasubramanian
Jun 11, 2008·Journal of the American Chemical Society·Chao WangShouheng Sun
Dec 19, 2008·Nano Letters·Tyler WestoverA Alec Talin
Feb 23, 2010·Nature Nanotechnology·Jean-Pierre ColingeRichard Murphy
Sep 14, 2011·Nanotechnology·Anmin NieHongtao Wang
Oct 5, 2011·Nano Letters·Jiong ZhaoJing Zhu
Feb 14, 2012·ACS Nano·Sung-Jin ChoiYang-Kyu Choi
Mar 22, 2012·Nano Letters·Mohammad M A HakimPeter Ashburn
Oct 17, 2012·Nano Letters·Myeong-Lok SeolYang-Kyu Choi

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Methods Mentioned

BETA
biosensors
scanning electron microscopy
x-ray spectroscopy

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