Controlled Layer-by-Layer Oxidation of MoTe2 via O3 Exposure

ACS Applied Materials & Interfaces
Xiaoming ZhengXueao Zhang

Abstract

Growing uniform oxides with various thickness on TMDs is one of the biggest challenges to integrate TMDs into complementary metal oxide semiconductor (CMOS) logic circuits. Here, we report a layer-by-layer oxidation of atomically thin MoTe2 flakes via ozone (O3) exposure. The thickness of MoO x oxide film could be tuning with atomic-level accuracy simply by varying O3 exposure time. Additionally, MoO x-covered MoTe2 shows a hole-dominated transport behavior. Our findings point to a simple and effective strategy for growing homogeneous surface oxide film on MoTe2, which is promising for several purposes in metal-oxide-semiconductor transistor, ranging from surface passivation to dielectric layers.

References

Nov 8, 2012·Nature Nanotechnology·Qing Hua WangMichael S Strano
Apr 3, 2014·Advanced Materials·Yen-Fu LinKazuhito Tsukagoshi
Oct 11, 2014·Nano Letters·Claudia RuppertTony F Heinz
Jan 16, 2015·Advanced Materials·Rohan DhallStephen Cronin
Mar 25, 2015·Nano Letters·Ignacio Gutiérrez LezamaAlberto F Morpurgo
Jun 20, 2015·Nature Communications·Yu-Chuan LinJoshua A Robinson
Jul 15, 2015·Nano Letters·Yingnan LiuKeji Lai
Mar 11, 2016·Nano Letters·Mahito YamamotoKazuhito Tsukagoshi
Jul 9, 2016·ACS Nano·Zhen LiStephen B Cronin
Aug 29, 2017·Advanced Materials·Deshun QuWon Jong Yoo

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Citations

Jul 20, 2019·Nanotechnology·Xiangzhe ZhangShiqiao Qin
Sep 13, 2019·Small·Hang YangShiqiao Qin
May 22, 2019·Nanomaterials·Qiyuan WangZhi-Jun Qiu
Feb 20, 2021·ACS Applied Materials & Interfaces·Tengyu JinWei Chen
Dec 23, 2020·ACS Applied Materials & Interfaces·Ankur NipaneJames T Teherani
Jan 18, 2020·Nano Letters·Isha M DatyeEric Pop
Apr 17, 2020·ACS Applied Materials & Interfaces·Aram YoonZonghoon Lee
May 1, 2020·ACS Applied Materials & Interfaces·Hang YangWei Chen
Sep 1, 2020·ACS Applied Materials & Interfaces·Mengjiao LiYen-Fu Lin
Dec 15, 2020·ACS Applied Electronic Materials·Ju Ying ShangLincoln J Lauhon

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