Cryogenic probe station for on-wafer characterization of electrical devices

The Review of Scientific Instruments
Damon RussellRodrigo Reeves

Abstract

A probe station, suitable for the electrical characterization of integrated circuits at cryogenic temperatures is presented. The unique design incorporates all moving components inside the cryostat at room temperature, greatly simplifying the design and allowing automated step and repeat testing. The system can characterize wafers up to 100 mm in diameter, at temperatures <20 K. It is capable of highly repeatable measurements at millimeter-wave frequencies, even though it utilizes a Gifford McMahon cryocooler which typically imposes limits due to vibration. Its capabilities are illustrated by noise temperature and S-parameter measurements on low noise amplifiers for radio astronomy, operating at 75-116 GHz.

References

Nov 13, 2013·The Journal of Cell Biology·Rebecca A GreenKaren Oegema

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Citations

Nov 5, 2014·The Review of Scientific Instruments·A S AverkinA V Ustinov
Feb 2, 2015·The Review of Scientific Instruments·Giuseppe CataldoKongpop U-Yen

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