Demonstration of Sputtering Atomic Layer Augmented Deposition: Aluminum Oxide-Copper Dielectric-Metal Nanocomposite Thin Films

ACS Applied Materials & Interfaces
Brian GiraldoNobuhiko P Kobayashi

Abstract

Designing a thin-film structure often begins with choosing a film deposition method that employs a specific process by which chemical species are formed and transported; in other words, a film deposition system in which two deposition methods are hybridized should lead to new ways of designing thin-film structures. This premise inspires us to combine atomic layer deposition (ALD) and magnetron sputtering (SPU) within a single chamber-supttering atomic layer augmented deposition (SALAD). SALAD takes full advantage of both ALD's precise and accurate precursor delivery and SPU's versatility in choosing chemical elements. A SALAD system is designed based on knowledge obtained from computational fluid dynamics with the goal of conceiving a film deposition system that satisfies deposition conditions distinctive for both ALD and SPU. As a demonstration, the SALAD system is utilized to deposit a unique nanocomposite made of aluminum oxide (Alo x ) thin films by ALD and copper (Cu) thin films by SPU-AlO x -Cu nanocomposite thin films. Spectroscopic reflectivity collected on AlO x -Cu nanocomposite thin films shows unique dispersion features to which conventional effective medium theories used for describing optical properties of composi...Continue Reading

References

Dec 1, 1988·Physical Review. B, Condensed Matter·J GhijsenM T Czyzyk
Oct 17, 2014·Nature·T KazimierczukM Bayer
Feb 2, 2017·Journal of Materials Science. Materials in Medicine·Marina GorbunovaLarisa Chekanova

❮ Previous
Next ❯

Related Concepts

Trending Feeds

COVID-19

Coronaviruses encompass a large family of viruses that cause the common cold as well as more serious diseases, such as the ongoing outbreak of coronavirus disease 2019 (COVID-19; formally known as 2019-nCoV). Coronaviruses can spread from animals to humans; symptoms include fever, cough, shortness of breath, and breathing difficulties; in more severe cases, infection can lead to death. This feed covers recent research on COVID-19.

Blastomycosis

Blastomycosis fungal infections spread through inhaling Blastomyces dermatitidis spores. Discover the latest research on blastomycosis fungal infections here.

Nuclear Pore Complex in ALS/FTD

Alterations in nucleocytoplasmic transport, controlled by the nuclear pore complex, may be involved in the pathomechanism underlying multiple neurodegenerative diseases including Amyotrophic Lateral Sclerosis and Frontotemporal Dementia. Here is the latest research on the nuclear pore complex in ALS and FTD.

Applications of Molecular Barcoding

The concept of molecular barcoding is that each original DNA or RNA molecule is attached to a unique sequence barcode. Sequence reads having different barcodes represent different original molecules, while sequence reads having the same barcode are results of PCR duplication from one original molecule. Discover the latest research on molecular barcoding here.

Chronic Fatigue Syndrome

Chronic fatigue syndrome is a disease characterized by unexplained disabling fatigue; the pathology of which is incompletely understood. Discover the latest research on chronic fatigue syndrome here.

Evolution of Pluripotency

Pluripotency refers to the ability of a cell to develop into three primary germ cell layers of the embryo. This feed focuses on the mechanisms that underlie the evolution of pluripotency. Here is the latest research.

Position Effect Variegation

Position Effect Variagation occurs when a gene is inactivated due to its positioning near heterochromatic regions within a chromosome. Discover the latest research on Position Effect Variagation here.

STING Receptor Agonists

Stimulator of IFN genes (STING) are a group of transmembrane proteins that are involved in the induction of type I interferon that is important in the innate immune response. The stimulation of STING has been an active area of research in the treatment of cancer and infectious diseases. Here is the latest research on STING receptor agonists.

Microbicide

Microbicides are products that can be applied to vaginal or rectal mucosal surfaces with the goal of preventing, or at least significantly reducing, the transmission of sexually transmitted infections. Here is the latest research on microbicides.

Related Papers

Journal of Nanoscience and Nanotechnology
Hyeong-Chul YoonSu-Jeong Suh
The Journal of Physical Chemistry. a
Tiina SarnetMarkku Leskelä
Chemical Communications : Chem Comm
Henrik H SønstebyOla Nilsen
Science and Technology of Advanced Materials
Peter Ozaveshe OvirohTien-Chien Jen
© 2021 Meta ULC. All rights reserved