Derivation of optical constants of metals from thin-film measurements at oblique incidence

Applied Optics
J E Nestell, R W Christy

Abstract

The reflectance R and transmittance T of thin absorbing films deposited on a transparent substrate are calculated for normal and oblique incidence, s and p polarization, and different film thicknesses. The results are presented as contours of constant R and T on the ñ plane, where ñ is the complex refractive index. The conditions for sensitive dependence of measured quantities on ñ are examined. A computer-based method of finding ñ from chosen combinations of measured R or T values is described. Oblique incidence measurements on thin films can give accurate results in some regions where other methods may be less sensitive. Accurate film-thickness values can be obtained from the optical measurements.

Citations

Oct 15, 1991·Physical Review. B, Condensed Matter·V N AntonovF Nava
Apr 4, 2015·Optics Express·Yajie JiangMartin A Green
Oct 15, 1988·Applied Optics·J M SiqueirosR Machorro
Feb 1, 1981·Applied Optics·K T CheeV V Truong
Mar 1, 1988·Applied Optics·M C Gupta
Oct 15, 1986·Applied Optics·E ValkonenJ E Sundgren
Jan 25, 2012·Applied Optics·Alexander V TikhonravovVladimir Pervak
Mar 16, 2019·Applied Optics·Mickaël Gilliot
Oct 15, 1987·Applied Optics·G DuplainP A Bélanger
Jun 1, 1978·Applied Optics·C M Horwitz
Mar 1, 1993·Applied Optics·E E Khawaja, F Bouamrane

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