Design and control of a decoupled two degree of freedom translational parallel micro-positioning stage

The Review of Scientific Instruments
Lei-Jie LaiLi-Min Zhu

Abstract

This paper presents a novel decoupled two degrees of freedom (2-DOF) translational parallel micro-positioning stage. The stage consists of a monolithic compliant mechanism driven by two piezoelectric actuators. The end-effector of the stage is connected to the base by four independent kinematic limbs. Two types of compound flexure module are serially connected to provide 2-DOF for each limb. The compound flexure modules and mirror symmetric distribution of the four limbs significantly reduce the input and output cross couplings and the parasitic motions. Based on the stiffness matrix method, static and dynamic models are constructed and optimal design is performed under certain constraints. The finite element analysis results are then given to validate the design model and a prototype of the XY stage is fabricated for performance tests. Open-loop tests show that maximum static and dynamic cross couplings between the two linear motions are below 0.5% and -45 dB, which are low enough to utilize the single-input-single-out control strategies. Finally, according to the identified dynamic model, an inversion-based feedforward controller in conjunction with a proportional-integral-derivative controller is applied to compensate for th...Continue Reading

References

Mar 5, 2008·The Review of Scientific Instruments·Kaixuan HuChia-Hsiang Menq
Sep 8, 2010·The Review of Scientific Instruments·Guoying Gu, Limin Zhu

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Citations

Jan 7, 2014·The Review of Scientific Instruments·Chun-Xia LiLi-Min Zhu
Apr 3, 2016·The Review of Scientific Instruments·Jaehyun ParkDaegab Gweon

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Software Mentioned

SOLID
ANSYS
Solidworks
MATLAB

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