Development, Fabrication, and Characterization of Hydrogel Based Piezoresistive Pressure Sensors with Perforated Diaphragms.

Sensors and Actuators. A, Physical
M P OrthnerF Solzbacher

Abstract

Hydrogels have been demonstrated to swell in response to a number of external stimuli including pH, CO(2), glucose, and ionic strength making them useful for detection of metabolic analytes. To measure hydrogel swelling pressure, we have fabricated and tested novel perforated diaphragm piezoresistive pressure sensor arrays that couple the pressure sensing diaphragm with a perforated semi-permeable membrane. The 2×2 arrays measure approximately 3 × 5 mm(2) and consist of four square sensing diaphragms with widths of 1.0, 1.25, and 1.5 mm used to measure full scale pressures of 50, 25, and 5 kPa, respectively. An optimized geometry of micro pores was etched in silicon diaphragm to allow analyte diffusion into the sensor cavity where the hydrogel material is located. The 14-step front side wafer process was carried out by a commercial foundry service (MSF, Frankfurt (Oder), Germany) and diaphragm pores were created using combination of potassium hydroxide (KOH) etching and deep reactive ion etching (DRIE).Sensor characterization was performed (without the use of hydrogels) using a custom bulge testing apparatus that simultaneously measured deflection, pressure, and electrical output. Test results are used to quantify the sensor se...Continue Reading

References

Nov 12, 2002·Biomacromolecules·In Suk HanJules J Magda
Jan 27, 2004·Advanced Drug Delivery Reviews·David T Eddington, David J Beebe
Dec 25, 2007·Chemical Reviews·Joseph Wang
Jun 3, 2010·The Review of Scientific Instruments·M P OrthnerF Solzbacher

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Citations

Jun 1, 2017·Hong Kong Journal of Occupational Therapy : HKJOT·Natália Sanches SilvaDaniel Marinho Cezar Da Cruz
Sep 28, 2017·Scientific Reports·Rajat Subhra KarmakarJer-Chyi Wang

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