Development of electrical-erosion instrument for direct write micro-patterning on large area conductive thin films

The Review of Scientific Instruments
Ángel Luis ÁlvarezMiguel García-Vélez

Abstract

We have developed a complete instrument to perform direct, dry, and cost-effective lithography on conductive materials, based on localized electrical discharges, which avoids using masks or chemicals typical of conventional photolithography. The technique is considered fully compatible with substrate transport based systems, like roll-to-roll technology. The prototype is based on two piezo nano-steppers coupled to three linear micro-stages to cover a large scale operation from micrometers to centimeters. The operation mode consists of a spring probe biased at low DC voltage with respect to a grounded conductive layer. The tip slides on the target layer keeping contact with the material in room conditions, allowing continuous electric monitoring of the process, and also real-time tilt correction via software. The sliding tip leaves an insulating path (limited by the tip diameter) along the material, enabling to draw electrically insulated tracks and pads. The physical principle of operation is based in the natural self-limitation of the discharge due to material removal or insulation. The so produced electrical discharges are very fast, in the range of μs, so features may be performed at speeds of few cm/s, enabling scalability ...Continue Reading

References

Mar 11, 2010·Advanced Materials·Yong ZhouKian Ping Loh
Sep 6, 2011·Nature Nanotechnology·Long JuFeng Wang
Apr 14, 2012·Nanotechnology·Jules A Gardener, J A Golovchenko
Apr 5, 2013·Nature Nanotechnology·Andrea C Ferrari, Denis M Basko

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