Direct Dopant Patterning by a Remote Monolayer Doping Enabled by a Monolayer Fragmentation Study

Langmuir : the ACS Journal of Surfaces and Colloids
Ori Hazut, Roie Yerushalmi

Abstract

The development of new doping methods extending beyond the traditional and well-established techniques is desired to match the rapid advances made in semiconductor (SC)-processing methods and nanostructure synthesis in numerous emerging applications, including the doping of 3D architectures. To address this, monolayer doping (MLD) and monolayer contact doping methods have been introduced recently. The MLD methods enable separation of the doping process of nanostructures from the synthesis step; hence, it is termed ex situ doping. Here, we present a new ex situ MLD method termed remote MLD (R-MLD). The noncontact doping method is based on the thermal fragmentation of dopant-containing monolayers and evaporation processes taking place during annealing of the uncapped monolayer dopant source positioned in proximity, however, without making physical contact with the target SC surface. We present a two-step annealing procedure that allows the study of the dopant monolayer fragmentation and evaporation stages and quantification of the doping levels obtained during each step. We demonstrate the application of R-MLD for achieving a large-scale direct patterning of silicon substrates with sharp doping profiles. The direct dopant pattern...Continue Reading

References

Nov 13, 2007·Nature Materials·Johnny C HoAli Javey
May 8, 2009·Nanotechnology·Pratyush Das KanungoUlrich Gösele
Mar 15, 2011·Advanced Materials·W Pim VoorthuijzenWilfred G van der Wiel
Dec 12, 2013·Journal of Visualized Experiments : JoVE·Ori HazutRoie Yerushalmi
Jul 18, 2014·ACS Nano·Ori HazutRoie Yerushalmi

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Citations

Sep 27, 2018·Langmuir : the ACS Journal of Surfaces and Colloids·Shlomo YitzchaikRoie Yerushalmi

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