Direct patterning of copper on polyimide using ion exchangeable surface templates generated by site-selective surface modification

Journal of the American Chemical Society
Kensuke AkamatsuHiroshi Yanagimoto

Abstract

We demonstrate site-selective chemical surface modification by dispensing potassium hydroxide solution onto polyimide, which confines source metallic ions that can subsequently be used in resist- and mask-free fabrication of copper circuit patterns. Metallization can be achieved by a wet chemical method, providing control over metal/polymer interfacial structures. Because the approach is compatible with other existing printing technologies and much simpler than conventional lithography-based methods, we propose that the present surface template method may be of general application in fabrication of metallized polymers as well as in development of integrated circuits with a variety of electronic circuit elements.

References

Mar 27, 2003·Journal of the American Chemical Society·Richard Murdey, J Todd Stuckless
Jan 8, 2004·Journal of the American Chemical Society·A S KorchevG Mills

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Citations

Apr 30, 2017·Journal of Synchrotron Radiation·Akinobu YamaguchiYuichi Utsumi
Mar 26, 2011·Chemphyschem : a European Journal of Chemical Physics and Physical Chemistry·Wei SuJuan Chen
Jun 28, 2017·Proceedings of the National Academy of Sciences of the United States of America·Letian DouPeidong Yang
Apr 2, 2010·ACS Applied Materials & Interfaces·Sara R Halper, Randy M Villahermosa
Oct 13, 2009·Langmuir : the ACS Journal of Surfaces and Colloids·Kensuke AkamatsuYoshinobu Nakamura
Jun 19, 2010·Langmuir : the ACS Journal of Surfaces and Colloids·Yasufumi MatsumuraHidemi Nawafune
Nov 13, 2010·ACS Applied Materials & Interfaces·Mutsumi KimuraHirofusa Shirai
Sep 29, 2012·The Journal of Physical Chemistry. B·Guanghui CuiLi Zhang
May 16, 2019·Langmuir : the ACS Journal of Surfaces and Colloids·Tzu-Jung LiuChih-Ming Chen
Mar 24, 2007·Langmuir : the ACS Journal of Surfaces and Colloids·Shengli QiRiguang Jin
Jul 26, 2006·Langmuir : the ACS Journal of Surfaces and Colloids·Teng-Yuan DongMing-Cheng Lin

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