Direct patterning of highly-conductive graphene@copper composites using copper naphthenate as a resist for graphene device applications

Nanoscale
Kaixi BiHuigao Duan

Abstract

We report an electron-beam lithography process to directly fabricate graphene@copper composite patterns without involving metal deposition, lift-off and etching processes using copper naphthenate as a high-resolution negative-tone resist. As a commonly used industrial painting product, copper naphthenate is extremely cheap with a long shelf time but demonstrates an unexpected patterning resolution better than 10 nm. With appropriate annealing under a hydrogen atmosphere, the produced graphene@copper composite patterns show high conductivity of ∼400 S cm-1. X-ray diffraction, conformal Raman spectroscopy and X-ray photoelectron spectroscopy were used to analyze the chemical composition of the final patterns. With the properties of high resolution and high conductivity, the patterned graphene@copper composites could be used as conductive pads and interconnects for graphene electronic devices with ohmic contacts. Compared to common fabrication processes involving metal evaporation and lift-off steps, this pattern-transfer-free fabrication process using copper naphthenate resist is direct and simple but allows comparable device performance in practical device applications.

References

Oct 23, 2004·Science·K S NovoselovA A Firsov
Mar 9, 2006·Nano Letters·Gun-Young JungR Stanley Williams
Apr 13, 2007·Chemical Reviews·Etienne MenardJohn A Rogers
Sep 4, 2008·Physical Review Letters·G GiovannettiP J Kelly
Feb 4, 2010·ACS Nano·Abhinav RastogiChristopher K Ober
Feb 8, 2011·Nature Nanotechnology·Fengnian XiaPhaedon Avouris
Jul 14, 2011·Nanoscale Research Letters·Siqi MaBo Cui
May 30, 2013·Advanced Materials·Dan G MateiAndrey Turchanin
Jul 7, 2015·Journal of the American Chemical Society·Peng-Cheng ChenChad A Mirkin
Mar 10, 2016·Advanced Materials·Eva BlascoMartin Wegener

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Methods Mentioned

BETA
electron-beam lithography
scanning electron microscopy
X-ray
atomic force microscopy
AFM
dot array

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