Direct replication of a glass micro Fresnel zone plate array by laser irradiation using an infrared transmissive mold

Optics Express
Runjia HanShinill Kang

Abstract

It is not yet possible to fabricate micrometer-scale, glass optical components with nanometer-scale precision. Glass thermal imprinting enhances production efficiency. However, dimensional changes caused by shrinkage are inevitable because of phase transitions. Replication is very difficult when high-level pitch precision is essential. We used an infrared-transparent silicon mold and a CO2 laser to perform replica-type, thermal surface texturing at the nanoscale level; we analyzed a glass Fresnel zone plate array to this end. The Fresnel zone plate array was 10 × 10 mm2 in area and featured a 20 × 20 array. The individual Fresnel zone plate diameter was 500 µm and had 21 rings of minimum linewidth 2.9 µm and height 737 nm.

References

Dec 19, 2007·Optics Letters·M EisnerJ Schwider
Aug 20, 2007·Optics Express·Ofer Manela, Mordechai Segev
Mar 20, 2010·Lab on a Chip·Ethan SchonbrunKenneth B Crozier
Jan 26, 2011·Optics Express·Joan Vila-ComamalaChristian David
Jun 6, 2019·Optics Express·Michal OdstrčilMirko Holler

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