Dynamic response of a cracked atomic force microscope cantilever used for nanomachining.

Nanoscale Research Letters
Haw-Long Lee, Win-Jin Chang

Abstract

The vibration behavior of an atomic force microscope [AFM] cantilever with a crack during the nanomachining process is studied. The cantilever is divided into two segments by the crack, and a rotational spring is used to simulate the crack. The two individual governing equations of transverse vibration for the cracked cantilever can be expressed. However, the corresponding boundary conditions are coupled because of the crack interaction. Analytical expressions for the vibration displacement and natural frequency of the cracked cantilever are obtained. In addition, the effects of crack flexibility, crack location, and tip length on the vibration displacement of the cantilever are analyzed. Results show that the crack occurs in the AFM cantilever that can significantly affect its vibration response.PACS: 07.79.Lh; 62.20.mt; 62.25.Jk.

References

Mar 3, 1986·Physical Review Letters·G BinnigC Gerber
May 21, 2010·Nanotechnology·Ramses V MartínezRicardo Garcia

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Citations

Sep 11, 2014·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Mohammad Abbasi, Seyed E Afkhami

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Methods Mentioned

BETA
atomic force microscopy
AFM
chip

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